PDF Spinning Rotor Gauge

W W W. M K S I N S T. C O M

Pressure Measurement

& Control

SRG-2CE

SPINNING ROTOR GAUGE

The MKS Spinning Rotor Gauge line is well established with users around the world as a stable, high accuracy transfer standard for high vacuum pressure measurements. We continue to be at the forefront of SRG development with the introduction of the SRG-2CE.

The sensing element of the SRG is a magnetically levitated stainless steel ball that resides in a tube connected to the vacuum system. The ball is suspended and rotated by the separable drive assembly. Once the ball reaches a certain rotational speed, the ball is allowed to free spin. Collisions of the gas molecules with the surface of the ball impart a drag which decelerates the ball. Pickup coils measure the deceleration. The electronics unit then uses an algorithm based on the sampling time, physical parameters and gas characteristics to accurately determine the pressure.

Features & Benefits

Traceable ? German Calibration Service, DKD

traceable ? Ensures absolute consistency ? Satisfies ISO9000 requirements ? Recognized transfer standard

Accurate ? Guaranteed precision from 5x10-7 to

1x10-2 mbar (Torr) ? Overall measuring range extends to 1

mbar (Torr) ? No thermal or ionization effects

inventory requirements

Stable ? Superior long term stability ? Wetted surfaces are stainless steel ? Assures chamber-to-chamber

consistency

Since the measurement principle is mechanical, there are no thermal or ionization effects (as is the case with ionization gauges) that will influence the accuracy of the measurements. Also, the calibration constant is only weakly influenced by the ball's surface roughness, making the SRG a very stable reference standard.

The SRG-2CE will find applications in metrology and in experiments where high accuracy and repeatability are essential. Away from the test bench, the MKS Spinning Rotor Gauge may also be used in situ on a process chamber to assure that your high vacuum gauges are providing accurate readings and that you have tool-totool consistency. This provides repeatable process results, high uptime and optimum cycle times.

When measuring flanges with non-calibrated balls are ordered, they will be checked for usability by the factory.

Investigations, as carried out by the Federal Physical Technical Institution (PTB), have shown that with proper care and no damaging effects, the property of the balls will remain almost unchanged for years. For application under laboratory conditions, we recommend a recalibration cycle of 1-2 years. NIST traceable calibrations are also available at an extra cost.

1DKD -- German Calibration Service. Calibration laboratory accredited and supervised by PTB.

Calibration, Traceability, Stability -- In addition to the SRG-2CE, MKS Instruments offers transfer standard Baratron pressure transducers to meet all of your needs for vacuum gauge calibration.

MKS Instruments, Inc. delivers the SRG-2CE with a calibrated ball along with a calibration certificate. Calibration is made against the reference standards of our DKD1 calibration laboratory. As a result, the Spinning Rotor Gauge SRG-2CE offers the user consistent traceability pursuant to ISO9000.

Dimensional Drawing -- Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

The complete SRG-2CE is comprised of a microprocessor-based electronics unit, a measuring head and a ball/flange assembly. Since the measuring head easily decouples from the ball/flange assembly, several permanently mounted ball/flange assemblies may be used with one measuring head and electronics unit. This facilitates taking measurements from multiple locations when continuous readings are not necessary.

Specifications

Measuring Range Accuracy Long-Term Stability Display Pressure Display Display Format Analog Output Switching Points Digital Interface Measuring Flange Rotor Rotor Frequency Operating Temperature Enclosure Weight Operating Voltage Electromagnetic Compatibility Programming Features

1 mbar (Torr) to 5 x 10-7 mbar (Torr) 1% of the measured value ?3 x 10-8 mbar (Torr) in the range up to 10-2 mbar (Torr) Better than 1% per year LED with 13mm digit height Pa, mbar, or Torr; user selectable Scientific notation; number of digits configurable 0-10 VDC, linear or logarithmic Two adjustable switching points with one relay each, max. load 2 A at 25 V or 1 A at 120 V RS-232 2? CF, made of stainless steel, bakeable up to 450?C (without measuring head) Stainless steel ball, 4.5 mm in diameter (nominal) Adjustable between 405 and 810 Hz Electronics: 10-40?C; measuring head: 10-50?C; ball/flange assembly bakeable to 400?C 19" slide-in unit, 2HU, approx. 380 mm deep Electronics: 5.3kg; measuring head: 0.6kg; measuring flange: 0.5kg 85 - 260 V; 50 - 440 Hz Fully CE compliant 15 programmable data sets to minimize set up time; database of 17 frequently used gases with the option for the user to add 8 additional gases

Ordering Information

Ordering Code Example: SRG2CE

Code

Type SRG-2CE Spinning Rotor Gauge

SRG2CE

SRG-2CE SRG-SH700 SRG-BF-CAL SRF-BF 001-8483 095-103390

Complete system (includes electronics, measuring head, ball/flange assembly, etc.) Measuring head with 3m long connecting cable Ball/flange system, calibrated Ball/flange system, not calibrated External printer option Printer cable

The sense/drive head and ball/flange assembly of the SRG-2CE are compatible with the former Spinning Rotor Gauge Type SRG-2.

Configuration SRG2CE

SRG2CE - 11/05 ? 2005 MKS Instruments, Inc. All rights reserved.

Global Headquarters 90 Industrial Way Wilmington, MA 01887-4610 Tel: 978.284.4000 Tel: 800.227.8766 (in U.S.A.) Web:

Specifications are subject to change without notice.

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