Semiconductor Yield Modeling Using Generalized Linear …
Voros, 1995). Hu (2009) points out that yield analysis usually has two purposes: to determine the root cause of yield loss and to build accurate models to predict yield. From a manufacturing viewpoint, it is also extremely important to predict yield impact based on in-line inspections (Nurani, Strojwas, Maly, Ouyang, Shindo, Akella, et al. (1998). ................
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